Denmark – Industrial machinery – Delivery and installation of a ICP Reactive ion etcher for silicon dielctrics
Open call for tenders published in the EU Official Journal. Closes in 42 days.
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for oxides and nitrides of silicon to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q3 2027. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse comm
- Buyer
- Danmarks Tekniske Universitet - DTU
- Country
- Denmark
- Submission deadline
- 23 Nov 2026
- Contract type
- Supplies
- Sector (CPV)
- Laboratory, optical and precision equipment, Industrial machinery
- Main CPV code
- 42000000
- Place of performance
- DK012
- Published
- 2026-10-12
- TED reference
- 701524-2026
Read the official notice on TED →
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