Denmark – Industrial machinery – Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)
Open call for tenders published in the EU Official Journal. Closes in 30 days.
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm.
- Buyer
- Danmarks Tekniske Universitet - DTU
- Country
- Denmark
- Submission deadline
- 15 Oct 2026
- Contract type
- Supplies
- Sector (CPV)
- Laboratory, optical and precision equipment, Industrial machinery
- Main CPV code
- 42000000
- Place of performance
- DK013
- Published
- 2026-09-11
- TED reference
- 628101-2026
Read the official notice on TED →
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