Germany – Laboratory, optical and precision equipments (excl. glasses) – Deposition Tool 8 Inch
Open call for tenders published in the EU Official Journal. Closes in 33 days.
The Technical University of Munich - Chair of Technical Physics E23/WMI will acquire a UHV cluster System for the fabrication of superconducting circuits on 8 inch'' wafers. The system must provide UHV conditions and has to include an HV load-lock chamber, a central handling chamber, a UHV chamber for the evaporation of Al thin films, a UHV chamber for sputtering of superconductors, a UHV chamber
- Buyer
- Lehrstuhl für Technische Physik E23, TUM
- Country
- Germany
- Submission deadline
- 05 Oct 2026
- Contract type
- Supplies
- Sector (CPV)
- Laboratory, optical and precision equipment, Industrial machinery
- Main CPV code
- 38000000
- Place of performance
- DE21H
- Published
- 2026-08-21
- TED reference
- 579224-2026
Read the official notice on TED →
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